Design and Analysis of Shunt Configuration-Based RF MEMS Switch
G V Ganesh1, K Srinivasa Rao2
1G V Ganesh, MEMS Research Center, Department of Electronics & Communication Engineering, Koneru Lakshmaih Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur-522502, Andhra Pradesh, India.
2K. Srinivasa Rao, MEMS Research Center, Department of Electronics & Communication Engineering, Koneru Lakshmaih Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur-522502, Andhra Pradesh, India.
Manuscript received on 25 June 2019 | Revised Manuscript received on 05 July 2019 | Manuscript published on 30 July 2019 | PP: 2034-2039 | Volume-8 Issue-9, July 2019 | Retrieval Number: I8627078919/19©BEIESP | DOI: 10.35940/ijitee.I8627.078919
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: In this paper a shunt type RF MEMS switch design and analysis for tunable applications is presented. Switch works based on the electrostatic actuation principle. Theoretical calculated Switch parameters are compared with the electromechanical and electromagnetic simulation results. The effect of various materials like conductor and dielectrics & parameters like airgap, beam width on the electromechanical parameters of the switch is analyzed to get low pull-in voltage, high switching speed, better capacitance ratio, return loss, insertion loss, and isolation loss. The switch up and down state capacitance are 40.9fF and 4.45pF respectively. Down to up state capacitance ratio of this switch is 108.69. The designed switch has an actuation voltage of 32V. RF performance is simulated from 1-10GHz. In ON state switch has return loss of -35dB, insertion loss of -0.1dB. In the OFF-state switch has return loss of -1dB and an isolation loss of -11dB.
Keywords: Shunt Configuration, Electrostatic Actuation, Pull-in Voltage, Switching Speed, Capacitance Ratio, Insertion loss, Isolation Loss.
Scope of the Article: Computational Techniques in Civil Engineering