RF MEMS Design and Fabrication Process for Communication
S. Sathya1, M. Anand2, M. Janaki Rani3, J. Senthil Murugan4
1S. Sathya, Research scholar, Department of Electronics and Communication Engineering, Dr. M.G.R. Educational and Research Institute University, Madhuravoyal, Chennai, India
2M. Anand, Professor, Department of Electronics and Communication Engineering, Dr. M.G.R. Educational and Research Institute University, Madhuravoyal, Chennai, India
3M. Janaki Rani, Professor, Department of Electronics and Communication Engineering, Dr. M.G.R. Educational and Research Institute University, Madhuravoyal, Chennai, India
4J. Senthil Murugan, Assistant Professor, Department of Veltech High Tech Dr. Rangarajan Dr. Sakunthala Engineering College, Avadi, Chennai, India.
Manuscript received on 10 June 2019 | Revised Manuscript received on 17 June 2019 | Manuscript Published on 19 June 2019 | PP: 616-624 | Volume-8 Issue-8S June 2019 | Retrieval Number: H11050688S19/19©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open-access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: In recent days, RF MEMs switches are developed for communication with different bandwidth range. It mostly used in real time application like military. But includes some advantages like large size, cost and efficiency. In order to overcome these issue, the proposed design is developed for KA band. The main objective of this work is reduced size, cost and high frequency range (Ka band) applications. A design of RF MEMS switch is carried out following the initialization of parameters like size, height, width, length, and thickness. Then the selection of material like silicon and air is performed. The configuration must be checked in terms of the boundary, edge, domain, and the vertices of edge. Conversely, the process of displacement will be carried out in the relative permeability, relative permittivity, dynamic viscosity, ratio of the specific heats, heat capacity, electrical conductance, thermal conductivity and so on. After that, the RF switch is used in the filter circuit for the extraction of filtered results. Then the performance analysis is made thereby comparing the existing methodologies with the proposed method. From the result, it is evident that the proposed methodology performs well than the existing methodologies.
Keywords: RF-MEMS, Filtering Application, KA Band, Displacement.
Scope of the Article: Communication Architectures for Pervasive Computing