Study of Effect of Number of Fingers in a Mems Differential Capacitive Accelerometer
S Sunithamani1, T.Yamini Priyanka2, P. Bhanu3, N. Sudharshan Reddy4
1S. Sunithamani, Department of ECE, Koneru Lakshmaiah Educational Foundation, Guntur, India.
2T. Yaminipriyanka, Department of ECE, Koneru Lakshmaiah Educational Foundation, Guntur, India.
3P. Bhanu, Department of ECE, Koneru Lakshmaiah Educational Foundation, Guntur, India.
4N. Sudharshan, Department of ECE, Koneru Lakshmaiah Educational Foundation, Guntur, India.
Manuscript received on 05 May 2019 | Revised Manuscript received on 12 May 2019 | Manuscript published on 30 May 2019 | PP: 975-979 | Volume-8 Issue-7, May 2019 | Retrieval Number: G5268058719/19©BEIESP
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Abstract: This paper is about the study of MEMS capacitive accelerometer for dual axis sensing. For the accelerometer design a capacitive approach is used and this depends on number of fingers attached to the proof mass. We have used a comb structured differential capacitive accelerometer and are studied with different fingers. We have studied and simulated a MEMS differential capacitive accelerometer using COMSOL Multiphysics. Index Terms:
Keyword: Capacitive Accelerometer, Dual Axis, Differential Capacitive Sensing, MEMS.
Scope of the Article: Remote Sensing