Sensitivity Enhancement and Optimization of Mems Piezoresistive Microcantilever Sensor for Ultra Mass Detection
N. Siddaiah1, A. Pujitha2, G. Jairam Sai3, U. Gupta4, Ch. Chaitanya5
1N. Siddaiah, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.
2A. Pujitha, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.
3G. Jairam Sai, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.
4U. Gupta, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.
5Ch. Chaitanya, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.
Manuscript received on 04 May 2019 | Revised Manuscript received on 09 May 2019 | Manuscript Published on 13 May 2019 | PP: 137-142 | Volume-8 Issue-7S May 2019 | Retrieval Number: G10280587S19/19©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open-access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: Micro-cantilevers are micro-mechanical structures fixed at one finish and move freely from different finish. In this paper silicon micro-cantilever sensors are designed with variable dimensions. The deserves of MEMS sensors are its sensitivity, simplicity and high speed. This paper proposed a enhanced Piezoresisitive micro-cantilever with square shaped stress concentration regions(SCR’s) at the immobile end and on the exterior of the micro-cantilever. The piezoresistor used in this simulation is p-doped semiconducting material (silicon). In this study various structures of Piezoresisitive micro-cantilevers are compared having various number of SCR’s by determining the stress and deflection characteristics. Results show that the cantilever with 72 SCR’s of dimension 250×100×1µm has greater stress and exhibits more deflection when load is applied.
Keywords: Piezoresisitive Micro-Cantilever, SCR’s, Stress and Deflection.
Scope of the Article: Communications