G10280587S19

Sensitivity Enhancement and Optimization of Mems Piezoresistive Microcantilever Sensor for Ultra Mass Detection
N. Siddaiah¹, A. Pujitha², G. Jairam Sai³, U. Gupta⁴, Ch. Chaitanya⁵

¹N. Siddaiah, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.

²A. Pujitha, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.

³G. Jairam Sai, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.

⁴U. Gupta, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.

⁵Ch. Chaitanya, Department of Electronics and Communications Engineering, Koneru Lakshmaiah Educational Foundation, Vaddeswaram, Andhra Pradesh, India.

Manuscript received on 04 May 2019 | Revised Manuscript received on 09 May 2019 | Manuscript Published on 13 May 2019 | PP: 137-142 | Volume-8 Issue-7S May 2019 | Retrieval Number: G10280587S19/19©BEIESP

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Abstract: Micro-cantilevers are micro-mechanical structures fixed at one finish and move freely from different finish. In this paper silicon micro-cantilever sensors are designed with variable dimensions. The deserves of MEMS sensors are its sensitivity, simplicity and high speed. This paper proposed a enhanced Piezoresisitive micro-cantilever with square shaped stress concentration regions(SCR’s) at the immobile end and on the exterior of the micro-cantilever. The piezoresistor used in this simulation is p-doped semiconducting material (silicon). In this study various structures of Piezoresisitive micro-cantilevers are compared having various number of SCR’s by determining the stress and deflection characteristics. Results show that the cantilever with 72 SCR’s of dimension 250×100×1µm has greater stress and exhibits more deflection when load is applied.

Keywords: Piezoresisitive Micro-Cantilever, SCR’s, Stress and Deflection.
Scope of the Article: Communications