Design and Simulation of Platinum Micro Heater for VOC Sensing Applications
S Sri Surya Srikanth1, B Rajesh Kumar2, V. Suresh3, V. Jyothi4
1S. Sri Surya Srikanth, Department of EECE, GITAM Deemed to be University, Visakhapatnam (Andhra Pradesh), India.
2Dr. B. Rajesh Kumar, Department of EECE, GITAM Deemed to be University, Visakhapatnam (Andhra Pradesh), India.
3Vasagiri Suresh, Department of EECE, GITAM Deemed to be University, Visakhapatnam (Andhra Pradesh), India.
4Dr. V. Jyothi, Department of EECE, GITAM Deemed to be University, Visakhapatnam (Andhra Pradesh), India.
Manuscript received on 22 November 2019 | Revised Manuscript received on 10 December 2019 | Manuscript Published on 30 December 2019 | PP: 145-148 | Volume-9 Issue-2S3 December 2019 | Retrieval Number: B10381292S319/2019©BEIESP | DOI: 10.35940/ijitee.B1038.1292S319
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open-access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: Micro electro-mechanical system (MEMS) technology is flourishing the development of various sensors. Conventionally MEMS devices have been extensively used for upward performance of gas sensors over a period of time. This paper presents the designing of meander shaped microheater with the commercial FEM tool is used for simulation. Microheater is designed for application of VOC sensing applications. As the volatile organic compounds are to be vaporized a microheater is used. The geometric aspects of the microheater state the temperature effects on the VOC’s. Thus the dimensions were optimized for uniform distribution of heat across the surface. It was observed from the analytical analysis and FEM simulation that at 2um thickness, Microheater was able to distribute the heat uniformity across the surface.
Keywords: Microheater, MEMS, FEM, VOC.
Scope of the Article: Low-power design